Precision Engineered Vacuum Pumps

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Turbomolecular, Rotary, Diaphragm and Scroll Pumps

Turbomolecular Pumps

All of our turbomolecular units are fitted with the BOC Edwards EXT70H Turbomolecular Pumping system as standard.

The turbomolecular pump is optimized for molecular flow conditions and requires a suitably sized two stage rotary vane pump or an oil free scroll pump (see below) to exhaust to atmosphere.

The design allows for high critical foreline pressures (typically up to 10 mbar) and options to use smaller backing pumps or dry diaphragm backing pumps.

Two Stage Rotary Pumps

Emitech use the BOC Edwards RV series of Rotary Vane Pumps. Unique in their capacity to dispatch high or low throughputs with high ultimate vacuum, they are the ideal choice for a wide range of applications and environments, together with low noise levels. All of the following Rotary Pumps are available as a primary pump or as a back up option for our turbomolecular units.

Key Features:

48 dBA
Intrusive frequencies minimised
Dual Mode
Fast acting inlet valve for system protection
High torque, dual voltage/dual frequency motor

No 3 Two Stage Rotary Pump

In high vacuum mode it is ideal for backing turbo pumps, analytical instruments, and electron microscopes. Configurable for high throughput mode.

Speed - (Pneurop 6602)
50 Hz operation - 2 ft3min-1 (3.3 m3h-1)
60 Hz operation - 2.3 ft3min-1 (3.9 m3h-1)
Ultimate Vacuum (Total Pressure) - High Vacuum Mode - 2 x 10-3 mbar
Inlet connection - NW25

Electrical supply
1-phase - 110-120 V or 220-240 V, 50 or 60 Hz
3-phase - 200-230 V or 380-460 V, 50 or 60 Hz

No 5 Two Stage Rotary Pump

Its exclusive dual-mode action lets the user easily configure the unit, to pump very high gas loads and accomplish excellent vacuum – all from a single pump.

Speed - (Pneurop 6602)
50 Hz operation - 3 ft3min-1 (5.1 m3h-1)
60 Hz operation - 3.6 ft3min-1 (6.2 m3h-1)
Ultimate Vacuum (Total Pressure) - High Vacuum Mode - 2 x 10-3 mbar
Inlet connection - NW25

Electrical supply
1-phase - 110-120 V or 220-240 V, 50 or 60 Hz
3-phase - 200-230 V or 380-460 V, 50 or 60 Hz

No 12 Two Stage Rotary Pump

A high performance pump with a wide performance envelope that's quiet and easy to maintain.

Speed - (Pneurop 6602)
50 Hz operation - 7.1 ft3min-1 (12.0 m3h-1)
60 Hz operation - 8.4 ft3min-1 (14.2 m3h-1)
Ultimate Vacuum (Total Pressure) - High Vacuum Mode - 2 x 10-3 mbar
Inlet connection - NW25

Electrical supply
1-phase - 110-120 V or 220-240 V, 50 or 60 Hz
3-phase - 200-230 V or 380-460 V, 50 or 60 Hz

Three-Stage Diaphragm Pump

A totally oil free, mechanical vacuum pump. Diaphragm pumps are a proficient and environmentally friendly alternative to water jet pumps. They do not consume water and, therefore, do not produce contaminated waste water.

Optimized kinetics for minimum work and wear of the diaphragm result in high reliability, low scuffing, long life and low noise level of the diaphragm.

The Three Stage Diaphragm Pump from Vaccubrand offers a low ultimate vacuum (absolut) 1.5 mbar

Volume flow rate m3/h (50/60 Hz) - 1.2 / 1.4
Motor power kW - 0.08

XDS Range of Dry Scroll Pumps

The XDS is a completely dry, lubricant-free vacuum pump with vapor handling. It overcomes problems associated with other scroll pumps such as reliability, cleanliness, servicing, shaft seal wear and vapour handling.

Designed by BOC Edwards to provide vacuum totally free of lubricants Emitech offer XDS5 & XDS10 Scroll Pumps as a back up option for the turbomolecular pumped units or as a primary pumping system.

XDS5 Dry Scroll Pump

This pump is portable, air-cooled and cost effective. Power consumption is very low and, typically, no other utilities are required.

Peak pumping speed
50 Hz operation - 4.8 m3h-1 (2.8 ft3min-1)
60 Hz operation - 6.0 m3h-1 (3.5 ft3min-1)
Ultimate vacuum (total pressure) - 1 x 10-2 torr
Inlet connection - NW25

Electrical Supply
1-phase - 110 V or 220-240 V (50 Hz), 115-120 V or 230-240 V (60 Hz)
3-phase - 200-220 V or 380-415 V (50 Hz), 200-230 V or 460 V (60 Hz)

XDS10 Dry Scroll Pump

Truly user serviceable; with no oil to change, annual maintenance can be completed typically in about 10 minutes without special tools.

Peak pumping speed
50 Hz operation - 9.3 m3h-1 (4.0 ft3min-1)
60 Hz operation - 11.1 m3h-1 (6.5 ft3min-1)
Ultimate vacuum (total pressure) - (7 ´ 10-2 mbar)
Inlet connection - NW25

Electrical Supply
1-phase - 110 V or 220-240 V (50 Hz) 115-120 V or 230-240 V (60 Hz)
3-phase - 200-220 V or 380-415 V (50 Hz) 200-230 V or 460 V (60 Hz)