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The K550X Coater with Rotating Specimen Stage

The K550X has a Rotating Specimen Stage which can also be tilted, built in as standard and accommodates a range of specimens and stubs, which together with pre-selectable parameters and K550X Sputter Coater | Image Pop UpFully Automatic Control, gives defined and repeatable film thickness depositions.

Employing a Magnetron Target Assembly, which enhances the efficiency of the process using low voltages, the K550X gives a Fine Grain, Cool Sputtering, without the need to cool the target or the specimen stage.

The Chamber is 165mm Diameter (6 inches), which allows very easy access to loading and removing specimens.

The Instrument is fitted with 60mm Diameter and 0.1mm thick Gold (or Customer choice) quick change target, giving optimum consumable cost performance. A range of targets are available including Gold/Palladium, Platinum/Palladium and Platinum.

The integrated instrument panel and plug-in electronics maximise 'up-time' and, with user-friendly designs, ensures satisfactory multi-user discipline. With manual operation by the user.

The Sputtering parameters can be pre-set, including the gas bleed needle valve which has electromagnetic valve back-up, so once set, it does not need to be adjusted. The sputtering head is interlocked, and the system can easily accommodate the K250 Carbon Coating Attachment.

The independent vacuum pump is controlled by the Instrument throughout the fully automatic coating cycle.


Features:

  • Fully Automatic Control
  • Low Voltage Sputtering
  • High Resolution Fine Coating (Order of 2nm Gold Grain)
  • Special Rotating Stage with full Tilt Facility fitted as standard
  • Even Thickness Deposition (Typically 20nm or 200 Angstroms for SEM work)
  • 165mm Diameter (6 inches) Chamber
  • Can be integrated with Film Thickness Monitor

Benefits:

  • Easy to operate
  • No cooling required
  • Precise reproducible coatings
  • Fully adaptable to a wide range of specimens
  • Repeatable film thickness depositions
  • Easy loading and unloading of specimens
  • Can pre-set deposition thickness

Specifications of the K550X Sputter Coater:

Instrument Case - 450mm W x 350mm D x 175mm H
Work Chamber - Borosilicate Glass 165mm Dia x 125mm H
Safety Shield - Polycarbonate
Weight - 18Kg
Target - 60mm Dia x 0.1mm Thick (Gold fitted as Standard)
Specimen Stage - 60mm Dia. Rotating Stage with Tilt facility. (Spacing to Target 40mm)
Vacuum Gauge Range - ATM - 1x10-4 mbar
Deposition Range - 0-50mA
Deposition Rate - 0-25nm/Minute
Sputter Timer - 0-4 minutes
Pre-set Needle Valve - Control of Argon Supply
Services - Argon - Nominal 5 psi
Vacuum Pump - Double stage Rotary Vacuum Pump, complete with
Recommended vacuum hose and Oil Mist Filter.
Electrical Supply - 230 Volts 50Hz (10 amp max. including Pump)
115 Volts 60Hz (16 amp max. including Pump)