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The K500X with Magnetron Target Assembly for Cool Sputtering

The K500X System employs a Magnetron Target Assembly which enhances the efficiency of the process using low voltages, and giving a K500X Sputter Coater | Image Pop UpFine Grain, Cool Sputtering, without the need to cool the target or the specimen stage.

The K500X has a Specimen Stage and accommodates a range of specimens and stubs.

The Chamber allows very easy access to loading and removing specimens.

The Instrument is fitted with Gold (or Customer choice) quick change target, giving optimum consumable cost performance. A range of targets are available including Gold/Palladium, Platinum/Palladium and Platinum.

The integrated instrument panel and plug-in electronics, maximise 'up-time' and, with user-friendly designs, ensures satisfactory multi-user discipline, with manual operation by the user.

The Sputtering parameters can be pre-set, including the gas bleed needle valve which has electromagnetic valve back-up, so once set, it does not need to be adjusted. The sputtering head is interlocked, and the system can easily accommodate the K250 Carbon Coating Attachment.

The independent vacuum pump is controlled by the Instrument.

Features:

  • Low voltage sputtering
  • High resolution fine coating (order of 2nm gold grain)
  • Even thickness deposition (typically 20nm or 200 angstroms for SEM work)
  • 165mm diameter (6 inches) chamber
  • Can be integrated with Film Thickness Monitor

Benefits:

  • No cooling required
  • Precise reproducible coatings
  • Repeatable film thickness depositions
  • Easy loading and unloading of specimens
  • Can pre-set deposition thickness

Specifications of the K500X Sputter Coater:

Instrument Case - 450mm W x 350mm D x 175mm H
Work Chamber - Borosilicate Glass 165mm Dia x 125mm H
Safety Shield - Polycarbonate
Weight - 18Kg
Target - 60mm Dia x 0.1mm Thick (Gold fitted as Standard)
Specimen Stage - 60mm Dia.
Vacuum Gauge Range - ATM - 1x10-2 mbar
Deposition Range - 0-50mA
Deposition Rate - 0-25nm/Minute
Sputter Timer - 0-4 minutes
Pre-set Needle Valve - Control of Argon Supply

Services - Argon - Nominal 5 psi
Vacuum Pump - Pump No. 5 complete with vacuum hose and Oil Mist Filter.
Recommended 85L./Min. 5m3/Hr.
Electrical Supply - 230 Volts 50Hz (10 amp max. including Pump)
115 Volts 60Hz (16 amp max. including Pump)