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The K975X High Vacuum Evaporation System for Multiple Applications

The K975X Turbo Evaporator, is a multiple application system to enable a range of preparation techniques to be applied with the flexibility and K975X Vacuum Evaporator | Image Pop Upmodule expansion capability to develop new methods and prepare new specimens.

It allows for Carbon Evaporation, Metal Evaporation from both Baskets and Crucibles and a Sputter Coating option.

A range of techniques can be practiced including carbon support films and replicas for TEM, Carbon/Metal Evaporation, Low Angle Shadowing and sequential layer coatings using dual source evaporation and the Sputter Coating option can be used for a range of target materials.

The system flexibility is further enhanced by the use of a microcontroller, which readily allows the Customer access to a range of options, but readily 'defaults' to optimum operating conditions, allowing both fully automatic and manual override as required.

The unique Loading Rack out Drawer sample system gives the user easy sample access with good sample size and the hinged lid assembly makes any other areas of the system readily accessible.

The unit has a Turbo Pump, externally mounted for convenience and easy exchange, and is backed up by a Rotary Vacuum Pump. The complete pumping sequence is under fully automatic control, achieving a high vacuum for evaporation.

The Unit is bench mounted, with easy to use controls, and cannot be damaged by inadvertent use.

Note: The K975s is based on the K975X, however it has a special load lock door which allows the entry of 8" wafer for carbon coating, with applications such as FIB work.


Features:

  • Automatic pumping sequence
  • Samples up to 140mm square or 200mm diameter
  • Unique 'anti-stick' carbon rod gun evaporation assembly
  • Rack out drawer sample loading system
  • Selectable evaporation supplies giving x 4 evaporation settings
  • Restricted or full vent control
  • Sputter coating (option) for range of metal targets
  • Film thickness monitor (option)

Benefits:

  • Ease of operation
  • Flexible usage
  • Reliable carbon evaporation
  • Convenient sample loading/unloading
  • Flexible operation - carbon and metal evaporation sources
  • Prevents disturbance of samples
  • Fully flexible system
  • Easy to measure level of metal or carbon deposition

Specifications of the K975X High Vacuum Evaporator:

Instrument Case - W :450mm x D500 x H:300mm
Borosilicate Glass Work Chamber with Hinged Top Plate - Dia: 250mm x H: 300mm (can accommodate samples to 200 mm) (8") in Dia.
Safety Polycarbonate Implosion Guard - To suit work chamber readily removable for maintenance
Weight - 65Kg.
Carbon Gun - Adjustable height with Tilt Control 0-20o. Uses 6.15mm Carbon Rods
Turbomolecular Pump - 100L/Seconds as Standard Optional Sizes Available
Vacuum Gauges - Active Gauge Head Atm to 1x10-7 mbar.
Working Vacuum - within 15 minutes
Operating Vacuum - Into x10-5 mbar range (Liquid Nitrogen Trap Option Available)
Evaporation Supply (Pulsed or Variable Control) - 4 x Selectable, Low Voltage Volts a.c. V, 5V, 15V,25V @ 25 amps. 7V @100 amps
Specimen Table - With Tilt Facility 0-45o
Rotating Specimen Table Option - 60mm Dia.Tilting 0-45o, with Variable Speed Control 15rpm To 45rpm

Sputtering Option
Deposition - 0 - 100mA
Deposition Rate - 0-50nm/Minute Gold (Au)
Standard Target - 57 mm Au (options Pt, Pt/Pd, Pd, Ni, Cu, Ag)
Timer - 0 to 4 Minutes
HT Safety Interlocked

Film Thickness Option

Glow Discharge Option

Services - Argon (For Sputtering option) Nominal 10 psi
Vacuum Pump - No2 Pump (2m3/Hr) pumping speed Oil Mist Filter, Vacuum Hose. (Included with Instrument)
Electrical supply - 230 Volts - 50/60Hz - 8 amp normal Including pump. 115 Volts - 50/60Hz - 16 amp normal including Pump

Note: In Circuits with Current Trips , when using Pulse for 230 v a 16amp minimum for 115 v a 32 amp minimum